Open AccessEvaluation of a CMOSSOS process using process validation wafers
Author(s) -
S E Suehle,
L.W. Linholm,
G M Marshall
Publication year - 1982
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.82-2514
Subject(s) - process (computing) , computer science , wafer , reliability engineering , process engineering , materials science , engineering , programming language , nanotechnology