Open AccessA computer program for analysis of data from microelectronic test structures
Author(s) -
R. L. Mattis,
Lindsay Till,
R. Frisch
Publication year - 1982
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.82-2492
Subject(s) - microelectronics , test (biology) , computer science , engineering , electrical engineering , geology , paleontology