Open AccessInvestigation of the two-dimensional shape of ion-implanted regions
Author(s) -
P. Roitman,
John Albers,
James R. Ehrstein,
David R. Myers
Publication year - 1981
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.81-2398
Subject(s) - ion , geometry , materials science , mathematics , physics , quantum mechanics