Open AccessDetection of phosphorus in epitaxial silicon by EPR
Author(s) -
TeTse Chang
Publication year - 1979
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.79-1748
Subject(s) - electron paramagnetic resonance , silicon , epitaxy , phosphorus , materials science , nanotechnology , optoelectronics , nuclear magnetic resonance , physics , metallurgy , layer (electronics)