Open AccessLoose-particle detection in microelectronic devices
Author(s) -
John S Hilten,
Paul S Lederer,
J Franklin Mayo-Wells,
Carol F Vezzetti
Publication year - 1979
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.6028/nbs.ir.78-1590
Subject(s) - microelectronics , particle (ecology) , nanotechnology , computer science , materials science , geology , oceanography