Open AccessA non-contacting length comparator with 10 nanometer precision
Author(s) -
A W Hartman,
F W Rosberry,
J Arol Simpson
Publication year - 1973
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.73-104
Subject(s) - comparator , nanometre , physics , optics , voltage , quantum mechanics