Open AccessResearch and Development of Chemical Mechanical Planarization for Ge2Sb2Te5
Author(s) -
Aodong He,
Bo Liu,
Zhitang Song,
Gaoming Feng,
Nanfei Zhu,
Jiadong Ren,
Guanping Wu,
Songling Feng
Publication year - 2013
Publication title -
acta chimica sinica
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.565
H-Index - 40
ISSN - 0567-7351
DOI - 10.6023/a13030326
Subject(s) - chemical mechanical planarization , chemistry , metallurgy , organic chemistry , layer (electronics) , materials science
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