Open AccessReactive DC Magnetron Sputtering-Induced the Formation of Amorphous CuN Films Embedded Nanocrystalline WC Phase
Author(s) -
Y. S. Lin,
Shihong Zhang
Publication year - 2016
Publication title -
journal of coating science and technology
Language(s) - English
Resource type - Journals
ISSN - 2369-3355
DOI - 10.6000/2369-3355.2016.03.01.3
Subject(s) - nanocrystalline material , materials science , amorphous solid , sputter deposition , nanocrystal , sputtering , cavity magnetron , phase (matter) , lubricant , composite material , metallurgy , thin film , crystallography , nanotechnology , chemistry , organic chemistry
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