Open AccessElectronic Bond Structure of Carbon Nitride Thin Film Deposited by HiPIMS and dc Magnetron Plasma
Author(s) -
Abhijit Majumdar,
Sadhan Chandra Das,
Vitaslav Stranak,
R. Hippler
Publication year - 2015
Publication title -
journal of coating science and technology
Language(s) - English
Resource type - Journals
ISSN - 2369-3355
DOI - 10.6000/2369-3355.2015.02.01.5
Subject(s) - high power impulse magnetron sputtering , x ray photoelectron spectroscopy , materials science , sputter deposition , cavity magnetron , carbon nitride , amorphous solid , analytical chemistry (journal) , amorphous carbon , nitride , thin film , sputtering , layer (electronics) , nanotechnology , chemistry , chemical engineering , crystallography , chromatography , engineering , catalysis , biochemistry , photocatalysis
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