Open AccessWafer defect detection method based on machine vision
Author(s) -
Chundong Zhao,
Xiaoyan Chen,
Dongyang Zhang,
Jianyong Chen,
Kuifeng Zhu,
Yuan Su
Publication year - 2020
Publication title -
proceedings of international conference on artificial life and robotics
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2435-9157
pISSN - 2188-7829
DOI - 10.5954/icarob.2020.os15-2
Subject(s) - wafer , machine vision , artificial intelligence , computer vision , computer science , pattern recognition (psychology) , materials science , optoelectronics