
Characteristics Study of Silicon Nanoparticles Produced by Physical Vapour Deposition
Author(s) -
Wafaa M. S. Al-Khayat,
Gerhard Wilde
Publication year - 2013
Publication title -
american journal of materials science
Language(s) - English
Resource type - Journals
eISSN - 2162-9382
pISSN - 2162-8424
DOI - 10.5923/j.materials.20120206.07
Subject(s) - materials science , silicon , nanoparticle , analytical chemistry (journal) , deposition (geology) , chemical vapor deposition , vapour deposition , hexagonal crystal system , nanotechnology , thin film , optoelectronics , crystallography , chemistry , paleontology , chromatography , sediment , biology