Open AccessSpectroscopic diagnostics and silicon cluster formation in silane plasmas
Author(s) -
Yeonwon Kim
Publication year - 2020
Publication title -
han-guk marin enjinieoring hakoeji
Language(s) - English
Resource type - Journals
eISSN - 2234-8352
pISSN - 2234-7925
DOI - 10.5916/jamet.2020.44.3.218
Subject(s) - silane , cluster (spacecraft) , plasma , silicon , materials science , nanotechnology , optoelectronics , chemistry , computer science , physics , nuclear physics , composite material , operating system