Miniaturized Wide-Range Field-Emission Vacuum Gauge | Zendy

Amra Avdić | Zendy; Anna Maria Lausch | Zendy; E. Bertagnolli | Zendy; Alois Lugstein | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Miniaturized Wide-Range Field-Emission Vacuum Gauge

Author(s) -

Amra Avdić,

Anna Maria Lausch,

E. Bertagnolli,

Alois Lugstein

Publication year - 2014

Publication title -

nanomaterials and nanotechnology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.412

H-Index - 21

ISSN - 1847-9804

DOI - 10.5772/59483

Subject(s) - materials science , cathode , anode , optoelectronics , field electron emission , focused ion beam , ultra high vacuum , range (aeronautics) , etching (microfabrication) , ion beam , electrode , ion , coaxial , reactive ion etching , nanotechnology , optics , beam (structure) , physics , composite material , electrical engineering , quantum mechanics , layer (electronics) , engineering , electron

Miniaturized vacuum gauges (MVGs) for the measurementrange 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfalignedapproach using focused ion beam (FIB) nanomachiningand reactive ion etching (RIE). The MVG consistsof two properly insulated electrodes integrated on top ofan atomic force microscopy (AFM) tip, forming a coaxialembodiment. The special design enables us to vary thecathode-anode separation and the turn-on voltage changesaccordingly. The experiments show that the MVGs operateat low bias potential and demonstrate very good I-Pdependence over a wide pressure range

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research