Open AccessPreparation of large-area grating structure by vibration-assisted nanoimprint
Author(s) -
Bo Sun,
AUTHOR_ID,
AUTHOR_ID,
Junfeng Xu,
Y. J. Gu,
Jian Lin,
Jie Li
Publication year - 2022
Publication title -
yingyong guangxue
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.229
H-Index - 9
ISSN - 1002-2082
DOI - 10.5768/jao202243.0105001
Subject(s) - finite difference time domain method , grating , vibration , materials science , computer science , acoustics , optics , optoelectronics , physics