Open AccessDefect detection algorithm of MEMS acoustic film based on frequency domain transformation
Author(s) -
Wei Dong,
Mei Sang,
Miao Yu,
HUANG Yaokang,
Hongguang Liu,
Tiegen Liu
Publication year - 2021
Publication title -
yingyong guangxue
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.229
H-Index - 9
ISSN - 1002-2082
DOI - 10.5768/jao202142.0603005
Subject(s) - microelectromechanical systems , transformation (genetics) , domain (mathematical analysis) , haar , algorithm , computer science , mathematics , artificial intelligence , materials science , mathematical analysis , nanotechnology , chemistry , biochemistry , gene , wavelet