Open AccessSimultaneous measurement sensor of temperature and stress based on UV lithography phase-shifted grating
Author(s) -
Yaosheng Hu,
陕西 西安 中国飞行试验研究院测试所,
Li Hanyang
Publication year - 2021
Publication title -
yingyong guangxue
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.229
H-Index - 9
ISSN - 1002-2082
DOI - 10.5768/jao202142.0108002
Subject(s) - lithography , grating , materials science , phase (matter) , optics , stress (linguistics) , temperature measurement , optoelectronics , physics , linguistics , philosophy , quantum mechanics