Open AccessResearch on high deterministic removal characteristics of fused quartz using RF focused ion beam source
Author(s) -
Yingxue Xi,
Weiguo Liu,
Zhanpeng Ma,
Jin Zhang,
Shun Zhou
Publication year - 2019
Publication title -
yingyong guangxue
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.229
H-Index - 9
ISSN - 1002-2082
DOI - 10.5768/jao201940.0203002
Subject(s) - quartz , ion , materials science , optics , beam (structure) , ion beam , physics , composite material , quantum mechanics