Open AccessResearch on the electron-beam characteristics according to the shape of electron lenses in low-energy microcolumn using Monte Carlo numerical analysis
Author(s) -
YoungChul Kim,
Ho-Seob Kim,
Dae-Wook Kim,
Seungjoon Ahn
Publication year - 2008
Publication title -
journal of the korea academia-industrial cooperation society
Language(s) - English
Resource type - Journals
eISSN - 2288-4688
pISSN - 1975-4701
DOI - 10.5762/kais.2008.9.1.023
Subject(s) - lens (geology) , electrostatic lens , cathode ray , optics , microelectromechanical systems , aperture (computer memory) , electron , electron optics , monte carlo method , electron gun , materials science , limiting , numerical aperture , physics , beam (structure) , optoelectronics , engineering , acoustics , statistics , mathematics , mechanical engineering , wavelength , quantum mechanics
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