Open AccessResearch on the electron-beam characteristics according to the shape of electron lenses in low-energy microcolumn using Monte Carlo numerical analysis
Author(s) -
YoungChul Kim,
HoSeob Kim,
Daewook Kim,
Seungjoon Ahn
Publication year - 2008
Publication title -
han'gug sanhag gi'sul haghoe nonmunji/han-guk sanhak gisul hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-4688
pISSN - 1975-4701
DOI - 10.5762/kais.2008.9.1.023
Subject(s) - lens (geology) , electrostatic lens , cathode ray , optics , microelectromechanical systems , aperture (computer memory) , electron , electron optics , monte carlo method , electron gun , materials science , limiting , numerical aperture , physics , beam (structure) , optoelectronics , engineering , acoustics , statistics , mathematics , mechanical engineering , wavelength , quantum mechanics