Open AccessPhysical issues for the next generation of nano devices
Author(s) -
MannHo Cho
Publication year - 2014
Publication title -
vacuum magazine
Language(s) - English
Resource type - Journals
ISSN - 2288-971X
DOI - 10.5757/vacmag.1.3.21
Subject(s) - semiconductor , semiconductor device , metrology , nanotechnology , engineering physics , field (mathematics) , nano , semiconductor industry , semiconductor device fabrication , process (computing) , materials science , semiconductor materials , computer science , engineering , optoelectronics , physics , manufacturing engineering , optics , mathematics , layer (electronics) , wafer , pure mathematics , composite material , operating system
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