Open AccessTechnology for the Multi-layer Nanoimprint Lithography Equipments and Nanoscale Measurement
Author(s) -
Jaejong Lee,
Kee-Bong Choi,
GeeHong Kim,
Hyungjun Lim
Publication year - 2015
Publication title -
vacuum magazine
Language(s) - English
Resource type - Journals
ISSN - 2288-971X
DOI - 10.5757/vacmac.2.1.10
Subject(s) - nanoimprint lithography , nanomanufacturing , nanotechnology , lithography , materials science , extreme ultraviolet lithography , next generation lithography , resist , electron beam lithography , layer (electronics) , optoelectronics , medicine , alternative medicine , pathology , fabrication
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