Open AccessProperties of Indium Tin Oxide Thin Films According to Oxygen Flow Rates by γ-FIB System
Author(s) -
D. H. Kim,
Chang-Hwan Son,
Myoung Soo Yun,
K. A. Lee,
Tae Hoon Jo,
Il Wan Seo,
HyunSeok Uhm,
I. T. Kim,
Eun Ha Choi,
G. S. Cho,
Gi Chung Kwon
Publication year - 2012
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2012.21.6.333
Subject(s) - indium tin oxide , thin film , analytical chemistry (journal) , materials science , scanning electron microscope , auger electron spectroscopy , indium , torr , sputtering , optoelectronics , chemistry , nanotechnology , composite material , physics , chromatography , nuclear physics , thermodynamics