Open AccessCrystallization and Optical Properties of Transparent AZO Thin Films
Author(s) -
Teresa Oh
Publication year - 2012
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2012.21.4.212
Subject(s) - materials science , thin film , crystallization , substrate (aquarium) , chemical vapor deposition , chemical engineering , inductively coupled plasma , volumetric flow rate , sputtering , plasma , optoelectronics , nanotechnology , oceanography , physics , quantum mechanics , geology , engineering