Open AccessA Study on the Optimization of the SiNx:H Film for Crystalline Silicon Sloar Cells
Author(s) -
Kyung Dong Lee,
Jae Won Kim,
S.S. Dahiwale,
Hyunpil Boo,
Sungeun Park,
Sung Ju Tark,
Dong Hwan Kim
Publication year - 2012
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2012.21.1.29
Subject(s) - silicon nitride , materials science , passivation , plasma enhanced chemical vapor deposition , chemical vapor deposition , crystalline silicon , silicon , solar cell , substrate (aquarium) , layer (electronics) , energy conversion efficiency , analytical chemistry (journal) , refractive index , optoelectronics , nanotechnology , chemistry , organic chemistry , oceanography , geology