Open AccessEffect of Plasma Density on the Tribological Properties of Amorphous Carbon Thin Films
Author(s) -
Y.S. Park,
J.D. Lee,
Byungyou Hong
Publication year - 2011
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2011.20.5.333
Subject(s) - materials science , amorphous carbon , high resolution transmission electron microscopy , sputter deposition , carbon film , composite material , amorphous solid , thin film , substrate (aquarium) , microstructure , carbon fibers , surface roughness , raman spectroscopy , sputtering , nanotechnology , composite number , optics , crystallography , chemistry , transmission electron microscopy , oceanography , physics , geology