Open AccessStudy on Availability about the Dielectric Constant of SiOC Thin Film
Author(s) -
Teresa Oh
Publication year - 2010
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2010.19.5.347
Subject(s) - dielectric , materials science , dipole , annealing (glass) , thin film , permittivity , ion , electron , analytical chemistry (journal) , composite material , nanotechnology , chemistry , optoelectronics , organic chemistry , physics , quantum mechanics