Open AccessDevelopment of Dry-Vacuum-Pump for Semiconductor/Display Process
Author(s) -
S.Y. Lee,
M. Noh,
Bu-hwan Kim,
A.S. Lee
Publication year - 2010
Publication title -
applied science and convergence technology
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2010.19.4.265
Subject(s) - vacuum pump , semiconductor , process (computing) , materials science , ultra high vacuum , mechanical engineering , optoelectronics , computer science , engineering , nanotechnology , operating system
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