Open AccessDevelopment of Dry-Vacuum-Pump for Semiconductor/Display Process
Author(s) -
이상윤,
노명근,
김병옥,
이안성
Publication year - 2010
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2010.19.4.265
Subject(s) - vacuum pump , semiconductor , process (computing) , materials science , ultra high vacuum , mechanical engineering , optoelectronics , computer science , engineering , nanotechnology , operating system