Open AccessEvaluation Scheme of Cryopump Performance for Gas Loads
Author(s) -
S. R. In,
S.H. Jeong
Publication year - 2010
Publication title -
applied science and convergence technology
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2010.19.3.169
Subject(s) - cryopump , crossover , throughput , nuclear engineering , computer science , value (mathematics) , simulation , reliability engineering , environmental science , telecommunications , engineering , artificial intelligence , machine learning , wireless
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