Open AccessEvaluation Scheme of Cryopump Performance for Gas Loads
Author(s) -
Sang Ryul In,
Seong Hun Jeong
Publication year - 2010
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2010.19.3.169
Subject(s) - cryopump , crossover , throughput , nuclear engineering , computer science , value (mathematics) , simulation , reliability engineering , environmental science , telecommunications , engineering , artificial intelligence , machine learning , wireless