Open AccessThermal Conductivity Measurement of High-k Oxide Thin Films
Author(s) -
김인구,
오은지,
김용수,
김석원,
박인성,
이원규
Publication year - 2010
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2010.19.2.141
Subject(s) - materials science , wafer , oxide , thermal conductivity , conductivity , analytical chemistry (journal) , thin film , optoelectronics , composite material , nanotechnology , metallurgy , chemistry , chromatography