Open AccessThe Review for Various Mold Fabrication toward Economical Imprint Lithography
Author(s) -
김주희,
김연상
Publication year - 2010
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2010.19.2.096
Subject(s) - nanoimprint lithography , replica , mold , lithography , materials science , wafer , nanotechnology , fabrication , optoelectronics , composite material , art , visual arts , medicine , alternative medicine , pathology