Open AccessProcess Optimization of ITO Film on PC Substrate Deposited by In-line Sputtering Method for a Resistive-type Touch Panel
Author(s) -
안민형,
조의식,
권상직
Publication year - 2009
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2009.18.6.440
Subject(s) - sputtering , sheet resistance , materials science , substrate (aquarium) , indium tin oxide , torr , resistive touchscreen , polycarbonate , transmittance , sputter deposition , optoelectronics , composite material , thin film , layer (electronics) , nanotechnology , electrical engineering , physics , oceanography , engineering , geology , thermodynamics