Open AccessProcess Characteristics of Atmospheric Pressure Plasma for Package Substrate Desmear Process
Author(s) -
Sun Joong Ryu
Publication year - 2009
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2009.18.5.337
Subject(s) - drill , atmospheric pressure plasma , substrate (aquarium) , atmospheric pressure , materials science , plasma , process (computing) , surface finish , surface roughness , plasma cleaning , composite material , optoelectronics , metallurgy , computer science , meteorology , geology , physics , oceanography , quantum mechanics , operating system