Open AccessThe Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter
Author(s) -
이화련,
홍인석,
티투안,
조용섭
Publication year - 2009
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2009.18.3.236
Subject(s) - ion source , analytical chemistry (journal) , ion current , materials science , ion , cobalt , ion beam , ion implantation , vaporization , rutherford backscattering spectrometry , chemistry , metallurgy , organic chemistry , chromatography