Open AccessThe Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter
Author(s) -
Hwa-Ryun Lee,
In-Seok Hong,
Tu Anh Trinh,
Yong-Sub Cho
Publication year - 2009
Publication title -
applied science and convergence technology
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2009.18.3.236
Subject(s) - ion source , analytical chemistry (journal) , ion current , materials science , ion , cobalt , ion beam , ion implantation , vaporization , rutherford backscattering spectrometry , chemistry , metallurgy , organic chemistry , chromatography
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom