Open AccessComputational Fluid Dynamic Modeling for Internal Antenna Type Inductively Coupled Plasma Systems
Author(s) -
Ji Bong Joo
Publication year - 2009
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2009.18.3.164
Subject(s) - inductively coupled plasma , materials science , antenna (radio) , plasma , nitriding , absorption (acoustics) , hydrogen , analytical chemistry (journal) , chemistry , layer (electronics) , composite material , electrical engineering , physics , quantum mechanics , organic chemistry , chromatography , engineering