Open AccessImprovement of PR Stripper Efficient and Change of Surface Hardness for HDI-PR Used by PLVA Method
Author(s) -
Soo-In Kim,
ChangWoo Lee
Publication year - 2008
Publication title -
applied science and convergence technology
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2008.17.6.544
Subject(s) - photoresist , materials science , ion , composite material , chemistry , analytical chemistry (journal) , layer (electronics) , chromatography , organic chemistry
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