Open AccessMicrostructure of ZnO Thin Film on Nano-Scale Diamond Powder Using ALD
Author(s) -
S.J. Park,
Sung-Jin Song
Publication year - 2008
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2008.17.6.538
Subject(s) - materials science , diamond , atomic layer deposition , microstructure , sintering , chemical vapor deposition , thin film , fluidized bed , scanning electron microscope , chemical engineering , metallurgy , nanotechnology , composite material , chemistry , organic chemistry , engineering