Open AccessNanocrystalline Si formation inside SiNxnanostructures usingionized N2gas bombardment
Author(s) -
Mi-Hee Jung,
Young-Ju Park,
HyunJoon Shin,
Jun-Seok Byun,
Jae-Jin Yoon,
Yong-Sup Park
Publication year - 2007
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2007.16.6.474
Subject(s) - nanocrystalline material , x ray photoelectron spectroscopy , nanostructure , materials science , annealing (glass) , transmission electron microscopy , photoluminescence , analytical chemistry (journal) , nanocrystal , ionization , nanotechnology , silicon , optoelectronics , chemistry , chemical engineering , composite material , ion , organic chemistry , chromatography , engineering