Open AccessDevelopment of a Residual Gas Analyzer Calibration System
Author(s) -
Sayong Hong,
In-Tae Lim,
J.T. Kim
Publication year - 2007
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/jkvs.2007.16.2.091
Subject(s) - residual gas analyzer , calibration , quadrupole mass analyzer , residual , helium , argon , gas analyzer , hybrid mass spectrometer , mass spectrometry , analytical chemistry (journal) , spectrum analyzer , sensitivity (control systems) , gas analysis , triple quadrupole mass spectrometer , nitrogen gas , spectrometer , chemistry , materials science , physics , atomic physics , selected reaction monitoring , optics , computer science , engineering , chromatography , environmental chemistry , electronic engineering , quantum mechanics , algorithm , tandem mass spectrometry