Open AccessHydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH4 Microwave Plasma
Author(s) -
Moon-Ki Han,
TaeHwan Kim,
J. Cha,
Dong-Hyun Kim,
Hae June Lee,
Hojun Lee
Publication year - 2017
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2017.26.2.34
Subject(s) - materials science , amorphous carbon , carbon film , microwave , ion source , deposition (geology) , amorphous solid , analytical chemistry (journal) , plasma , torr , carbon fibers , langmuir probe , composite material , thin film , nanotechnology , plasma diagnostics , chemistry , crystallography , composite number , organic chemistry , physics , quantum mechanics , paleontology , sediment , biology , thermodynamics