Open AccessFull 3D Level Set Simulation of Nanodot Fabrication using FIBs
Author(s) -
Heung-Bae Kim
Publication year - 2016
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2016.25.5.98
Subject(s) - nanodot , materials science , fabrication , substrate (aquarium) , etching (microfabrication) , focused ion beam , deposition (geology) , set (abstract data type) , silicon , semiconductor device fabrication , nanotechnology , ion beam , lithography , monte carlo method , beam (structure) , optoelectronics , photolithography , computer science , layer (electronics) , optics , ion , chemistry , physics , alternative medicine , mathematics , oceanography , pathology , biology , paleontology , programming language , medicine , statistics , organic chemistry , sediment , wafer , geology