Open AccessA Three-Dimensional Calculation of the Reactor Impedance for Planar-Type Cylindrical Inductively Coupled Plasma Sources
Author(s) -
Deuk-Chul Kwon,
N. S. Yoon
Publication year - 2015
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2015.24.6.237
Subject(s) - inductively coupled plasma , bessel function , planar , plasma , electrical impedance , physics , antenna (radio) , excitation , electromagnetic field , computational physics , mathematical analysis , optics , mathematics , computer science , electrical engineering , engineering , quantum mechanics , computer graphics (images)