Open AccessFailure Analysis of Filaments of Quadrupole Mass Spectrometer for Plasma Process Monitoring
Author(s) -
Sung Yong Ha,
Dong Hoon Kim,
Ji Bong Joo
Publication year - 2015
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2015.24.5.142
Subject(s) - protein filament , tungsten , mass spectrometry , plasma , quadrupole mass analyzer , evaporation , materials science , quadrupole , analytical chemistry (journal) , spectrometer , chemistry , atomic physics , composite material , metallurgy , optics , physics , nuclear physics , chromatography , thermodynamics