Open AccessEffect of Oxygen Flux on FTO Thin Films Using DC and RF Sputtering
Author(s) -
Eun Mi Park,
Dong Hoon Lee,
Moon Suhk Suh
Publication year - 2015
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2015.24.2.41
Subject(s) - materials science , optoelectronics , transparent conducting film , transmittance , tin oxide , indium tin oxide , thin film , sputtering , doping , sputter deposition , visible spectrum , refractive index , infrared , indium , oxide , optics , nanotechnology , physics , metallurgy