Open AccessCharacterization of Al Doped ZnO Thin Films Prepared by RF Magnetron Sputtering Under Various Substrate Temperatures
Author(s) -
Deok Kyu Kim,
Hong Bae Kim
Publication year - 2014
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2014.23.5.260
Subject(s) - materials science , sheet resistance , substrate (aquarium) , sputter deposition , thin film , analytical chemistry (journal) , doping , surface roughness , ohm , sputtering , cavity magnetron , atmospheric temperature range , layer (electronics) , optoelectronics , composite material , nanotechnology , chemistry , oceanography , physics , chromatography , quantum mechanics , meteorology , geology