Open AccessNumerical Investigation of RF Pulsing Effect on Ion Energy Distributions at RF-biased Electrodes
Author(s) -
Deuk-Chul Kwon,
MiYoung Song,
JungSik Yoon
Publication year - 2014
Publication title -
applied science and convergence technology/han'gug jin'gong hag'hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-6559
pISSN - 1225-8822
DOI - 10.5757/asct.2014.23.5.246
Subject(s) - electrode , radio frequency , materials science , ion , plasma , optoelectronics , energy (signal processing) , substrate (aquarium) , rf power amplifier , atomic physics , computational physics , physics , telecommunications , computer science , amplifier , oceanography , cmos , quantum mechanics , geology