Open AccessOperating point of Capacitive Micromachined Ultrasonic Transducers with Sub-structural Elements
Author(s) -
Inga Morkvėnaitė-Vilkončienė,
Darius Viržonis,
Gailius Vanagas,
Valdas Krikscikas
Publication year - 2012
Publication title -
elektronika ir elektrotechnika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.224
H-Index - 26
eISSN - 2029-5731
pISSN - 1392-1215
DOI - 10.5755/j01.eee.18.9.2804
Subject(s) - materials science , capacitive sensing , surface roughness , dielectric , capacitance , surface finish , voltage , etching (microfabrication) , rectangle , ultrasonic sensor , smoothing , acoustics , optoelectronics , electrical engineering , composite material , geometry , chemistry , engineering , electrode , mathematics , physics , layer (electronics) , statistics