Open AccessA Study on Structure and Magnetic Properties of Fe-N Thin Films with Different DC Magnetron Sputtering Power and Time
Author(s) -
Dongwon Han,
Won-Uk Park,
Jong-Woo Kim,
Ah-Ram Kwon
Publication year - 2017
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2017.50.2.119
Subject(s) - materials science , thin film , sputter deposition , cavity magnetron , sputtering , high power impulse magnetron sputtering , power (physics) , optoelectronics , engineering physics , nanotechnology , engineering , thermodynamics , physics