Open AccessAnalysis of the Na Gettering in PSG/SiO2/Al-1%Si Multilevel Thin Films using XPS and SIMS
Author(s) -
Jin Young Kim
Publication year - 2016
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2016.49.5.467
Subject(s) - x ray photoelectron spectroscopy , thin film , passivation , getter , analytical chemistry (journal) , materials science , secondary ion mass spectrometry , sputtering , sputter deposition , chemical state , impurity , chemical vapor deposition , silicon , mass spectrometry , chemistry , layer (electronics) , chemical engineering , optoelectronics , nanotechnology , organic chemistry , chromatography , engineering