Open AccessDiffusion Behaviors and Electrical Properties in the In-Ga-Zn-O Thin Film Deposited by Radio-frequency Reactive Magnetron Sputtering
Author(s) -
Seok Ryeol Lee,
Jae Ha Choi,
Ho Seong Lee
Publication year - 2015
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2015.48.6.322
Subject(s) - analytical chemistry (journal) , thin film , materials science , x ray photoelectron spectroscopy , annealing (glass) , sputter deposition , substrate (aquarium) , diffusion barrier , sputtering , diffusion , cavity magnetron , chemistry , nuclear magnetic resonance , metallurgy , composite material , nanotechnology , layer (electronics) , physics , oceanography , chromatography , geology , thermodynamics