Open AccessSubstrate Temperature Dependence of Microcrystalline Silicon Thin Films by Combinatorial CVD Deposition
Author(s) -
Yeonwon Kim
Publication year - 2015
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2015.48.3.126
Subject(s) - substrate (aquarium) , chemical vapor deposition , deposition (geology) , silicon , microcrystalline , materials science , plasma enhanced chemical vapor deposition , etching (microfabrication) , thin film , analytical chemistry (journal) , chemical engineering , nanotechnology , optoelectronics , chemistry , layer (electronics) , crystallography , organic chemistry , paleontology , oceanography , sediment , geology , engineering , biology