Open AccessEffect of Atomic Layer Deposited Al<sub>2</sub>O<sub>3</sub> Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films
Author(s) -
Eun Young Yun,
WooJae Lee,
Kyung Su Jang,
HyunJin Choi,
Woo-Chang Choi,
SeHun Kwon
Publication year - 2015
Publication title -
journal of the korean institute of surface engineering
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2015.48.2.50
Subject(s) - atomic layer deposition , layer (electronics) , materials science , chemistry , nanotechnology
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