Open AccessEffect of Atomic Layer Deposited Al<sub>2</sub>O<sub>3</sub> Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films
Author(s) -
Eun Young Yun,
WooJae Lee,
Kyung Su Jang,
Hyun-Jin Choi,
Wookap Choi,
SunHong Kwon
Publication year - 2015
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2015.48.2.50
Subject(s) - atomic layer deposition , layer (electronics) , materials science , chemistry , nanotechnology